Scope shown for online ordering

Reference price range: USD 1,000,000 – 8,000,000 (per cluster tool, by chambers). Final quotation depends on specification, materials and order quantity — contact us for details.
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Wafer Processing Cluster Tool — multi-chamber vacuum platform; plasma etch or CVD deposition module; load-lock FOUP interface; robotic wafer handler; process control software.

Reference price range: USD 1,000,000 – 8,000,000 (per cluster tool, by chambers). Final quotation depends on specification, materials and order quantity — contact us for details.